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Dettagli:
Termini di pagamento e spedizione:
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Velocità di pompaggio: | 1401L/s | lubrificazione: | Maglev |
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Flangia: | ISO-F/CF 200 | Raffreddamento: | Acqua |
nome: | Anti corrosione di attrito 5 di asse della pompa zero di Turbomolecular | parola chiave: | Pompa di Turbomolecular |
Evidenziare: | pompa turbomolecular di attrito zero,una pompa turbomolecular di 5 assi,anti corrosione della pompa turbomolecular |
Water Cooling Maglev Lubrication Turbomolecular Pump CE
Technologies:
Specifications:
Model | CXF-200/1401 |
Pump Speed(l/s,Air) | 1400 |
Compression Ratio | >1×107 |
Ultimate Vacuum(Pa) | ≤2×10-6 |
Inlet Flange | DN200 ISO K(LF) |
DN200 ISO F | |
DN200 ISO CF | |
Outlet Flange | KF 40 |
Rotation Speed(rpm) | 33000 |
Run-up Time(min) | 6 |
VIB (mm) | <0.05 |
Backing Pump (L/s) | 15 |
Mounting or ientation | Any |
Cooling method | Water |
Weight(kg)(With Controller) | 51 |
Applications:
Series magnetically levitated molecular pumps are mainly applied to fields of semiconductor manufacturing, clip manufacturing, industrial plating and scientific instruments, especially to extraction of corrosive gases existing in etch, CVD, PVD and ion implantation and gases easily coagulated at normal temperature.
Persona di contatto: sales
Telefono: +8613810212935